Colibrys SA

Company information:

Colibrys (Sagem, Safran) is a Swiss MEMS manufacturer, providing capacitive accelerometers and gyros resistant to harsh environments. Its products are designed for accuracy and offer the best performance stability combined with shock resistance, as well as the lowest non-linearity and noise in the marketplace. Colibrys sensors are used in numerous safety-critical applications to measure acceleration, inclination, vibration and angular rate.

For more information: www.colibrys.com.

Product lines

Inertial Sensors

• MS9000 MEMS Accelerometer
• HS8000 High Shock Inertial Sensor

Inclinometers

• TS9000 Inclinometer

Vibration Sensors

• VS1000 Vibration Sensor
• VS9000 Vibration Sensor

Gyrometer Sensors

• GS1000 Sensor

Gyrometer Modules

• GM1000 Module
• GM1000Px Multi-axis Module

Custom services

The company propose a wide range of process capabilities

• Photolithography
• Deep reactive ION etching
• Surface micromachining on SOI
• Micro-hotplate module with low-stress SiNx and Pt metallization Lift-off metal patterning
• Metal evaporation including patterning through high-precision shadow masks
• KOH etching
• Range of die singulation methods